Metrology and inspection
Small but fast-growing: sales rose 28% in 2025 to €825 million.
The numbers
Metrology and inspection sales€825 millionFY2025 · +28% vs FY2024 · source ↗
What it is
YieldStar optical metrology and e-beam inspection systems that measure overlay and detect defects during chip manufacturing. Growth in 2025 came from higher YieldStar and e-beam system sales.
Why it matters to the stock. Metrology is a small share of revenue, but it sells alongside EUV and DUV and is a route to more of each fab's process-control spending.
News
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